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Pfeiffer Vacuum PKR 251 Operating Instructions Manual

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OPERATING INSTRUCTIONS

EN

Translation of the Original

PKR 251

Pirani/Cold cathode gauge

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Summary of Contents for Pfeiffer Vacuum PKR 251

  • Page 1
    OPERATING INSTRUCTIONS Translation of the Original PKR 251 Pirani/Cold cathode gauge…
  • Page 2
    Dear customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
  • Page 3: Table Of Contents

    Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Transportation and storage Product description Identifying the product Scope of delivery…

  • Page 4
    Table of contents Service solutions from Pfeiffer Vacuum Ordering information 13.1 Ordering parts 13.2 Spare parts 13.3 Accessories Technical data and dimensions Appendix 15.1 Units of pressure 15.2 Gas throughputs ETL Listed Declaration of conformity 4/52…
  • Page 5
    List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Operating modes Tbl. 5: Constants Tbl. 6: Conversion table Tbl. 7: Calibration factors for the pressure range < 10 hPa Tbl. 8: Malfunctions Tbl.
  • Page 6
    List of figures List of figures Fig. 1: Measuring configuration Fig. 2: Establishing the vacuum connection Fig. 3: Removing/installing the magnetic unit (recommended for CF-F) Fig. 4: Connection diagram Fig. 5: Measurement cable and Hirschmann cable socket Fig. 6: Light emitting diode (LED) Fig.
  • Page 7: About This Manual

    The part number is found on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale (dimensions in mm).

  • Page 8: Conventions

    This section describes all the stickers on the product along with their meaning. Rating plate D-35614 Asslar The rating plate is located on the top of Mod. PKR 251 PT R26 xxx 3103457 the device. xxxxxxxxx Made in Liechtenstein 2019/04 Input 15…30 V DC 2 W…

  • Page 9: Abbreviations

    About this manual 1.3.4 Abbreviations Abbreviation Explanation Atmosphere High vacuum cpl. Complete unit Mean sea level Seconds Width across flats Tbl. 3: Abbreviations used 1.4 Trademarks ● FullRange ® is a trademark of Pfeiffer Vacuum GmbH. 9/52…

  • Page 10: Safety

    Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during transportation NOTICE…

  • Page 11
    ► Maintain the distances specified by the manufacturer of the pacemakers. – Pfeiffer Vacuum recommends a safety distance of at least 130 mm between the pacemaker and the product. ► Avoid the influence of strong magnetic fields by means of magnetic field shielding.
  • Page 12
    ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
  • Page 13: Safety Precautions

    ► Operate the device away from fluids and humidity sources. ► Take special precautions if there is a risk of dripping water. ► Do not switch on the device if fluid has penetrated into it, instead contact the Pfeiffer Vacuum Service Center.

  • Page 14: Proper Use

    The gauge can not be used for the measurement of highly flammable or combustible gases in the mix- ture with an oxidizing agent (e.g. atmospheric oxygen) within the explosion limits. The gauge can be operated with a Pfeiffer Vacuum total pressure measuring and control unit, or with an evaluation unit provided by the customer.

  • Page 15: Personnel Qualification

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical training. For more information, please contact Pfeiffer Vacuum technical training.

  • Page 16: Operator Requirements

    4. Comply with the application limits. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered by this operating manual. – You can find information in the Pfeiffer Vacuum service area.

  • Page 17: Transportation And Storage

    Transportation and storage 3 Transportation and storage NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. NOTICE Damage caused by improper storage Improper storage will lead to damage to the product.

  • Page 18: Product Description

    4 Product description 4.1 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. Recording rating plate data 1. Read the data on the product rating plate. 2. Record this data.

  • Page 19: Installation

    Installation 5 Installation 5.1 Establishing the vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010.

  • Page 20: Removing/Installing The Magnetic Unit

    Installation Fig. 2: Establishing the vacuum connection 1 Protective cap Tensioning piece Procedure 1. Ensure that the permissible operating temperature of the gauge is not exceeded. 2. Observe space required for the electrical connection (e.g. permissible bending radii for the ca- bles).

  • Page 21: Establishing The Electrical Connection

    ► Only connect the product to devices which meet the following criteria: ● Requirements of the earthed protective extra-low voltage (PELV) ● Limited power source (LPS) Class 2 ► Secure the line to the product. – Pfeiffer Vacuum measuring and control equipment complies with this requirement. 21/52…

  • Page 22: Measurement Cable And Hirschmann Cable Socket

    ► Always connect the supply earth (Pin 5) with the earth for the supply unit. ► Always connect the shielding (Pin 6) with the earth for the supply unit. To operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit, you will require a corresponding measurement cable from the ActiveLine Accessories.

  • Page 23
    Installation Manufacturing a measurement cable 1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences in potential or EMC will influence the measuring signal. – Use a cable with braided shield and metallic connector housing. – Additional information regarding measurement cable type and conductor cross-sections can be obtained in the technical data.
  • Page 24: Operation

    Operation 6 Operation Once the supply voltage has been established, the measuring signal is available at the electrical con- nection (Pins 2 and 3). Operating the gauge 1. Respect the stabilization period of at least 10 minutes. 2. Respect the relation between measuring signal and pressure. 3.

  • Page 25: Relation: Measuring Signal And Pressure

    Operation 6.2 Relation: measuring signal and pressure 1E+04 torr 1E+02 1E+00 1E–02 1E–04 1E–06 1E–08 0.0 0.5 10.5 U [V] Fig. 7: Relation: measuring signal and pressure p Pressure Measuring signal [V] Calculation Validity range: ● 5 × 10 hPa < p < 1000 hPa ●…

  • Page 26: Gas Type Dependence

    The measuring signal is gas type dependent. The characteristics apply for nitrogen (N ), oxygen (O dry air and carbon monoxide (CO). When operating the gauge with a Pfeiffer Vacuum total pressure measuring and control unit (TPG), you can enter a calibration factor to adjust the displayed measured value.

  • Page 27
    Operation Pressure range from 10 up to 0.1 hPa p [hPa] –1 –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 [hPa] Fig. 9: Pressure range from 10 up to 0.1 hPa Calibration factors Within the pressure range < 10 hPa, the display is linear.
  • Page 28: Ignition Delay

    Operation Gas type Calibration factor (C) Neon (Ne) Argon (Ar) Krypton (Kr) Xenon (Xe) The calibration factors provided are mean values. Tbl. 7: Calibration factors for the pressure range < 10 6.4 Ignition delay Cold cathode measuring systems have an ignition delay upon activation. This ignition delay is longer for lower pressures and is typically in clean, degassed units: ●…

  • Page 29
    Operation Influencing the degree of contamination It is possible to influence the level of contamination to a certain extent. Particular care should be afford- ed for vapors which are separated in the plasma (e.g. from the cold cathode measuring system). 1.
  • Page 30: Disassembly

    Disassembly 7 Disassembly DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010.

  • Page 31
    Disassembly 5. Recommendation: Remove the magnetic unit of the gauge temporarily if disassembling is only possible with the magnetic unit removed. – This will facilitate disassembling the CF flange connection. 6. Disconnect the gauge from the vacuum system. 7. Put the protective cap on the connection flange. 31/52…
  • Page 32: Maintenance

    The dominant cold cathode measuring circuit for the low pressure range (< 1 × 10 hPa) has been cali- brated by Pfeiffer Vacuum to a fixed value at the factory. It is possible, however, to readjust the Pirani measuring circuit. Calibration has a negligible influence on the pressure range between approximately hPa and 10 hPa.

  • Page 33: Calibrating The Gauge (Hv)

    Maintenance Fig. 11: Calibrating the gauge (HV) 1 Button Rating plate (rotatable) 2 Potentiometer «HV» Performing an HV calibration Required tools ● Screwdriver (1.5 mm) ● Stylus (max. Ø 3 mm) Required aids ● Control unit or voltmeter 1. Activate the gauge, as near as possible to the subsequent operating position. 2.

  • Page 34: Disassembling The Gauge

    Maintenance Required aids ● Control unit or voltmeter 1. Activate the gauge, as near as possible to the subsequent operating position. 2. Allow the gauge to run for at least 10 minutes at atmospheric pressure. 3. Turn the rating plate in a clockwise direction up to the stop. 4.

  • Page 35: Cleaning Of Components

    ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.

  • Page 36
    ► Do not use solvents as they attack the surface. ► Do not use any aggressive or abrasive cleaning agents. Cleaning the measurement chamber Pfeiffer Vacuum recommends replacing the Pirani measuring element when cleaning the measurement chamber. Replacing the Pirani measuring element Pfeiffer Vacuum recommends replacing any heavily contaminated or faulty Pirani measur- ing elements.
  • Page 37: Assembling The Gauge

    Maintenance Required spare parts ● FPM seal (Pirani measuring element) 1. Disassemble the gauge to the degree required. 2. Remove the FPM seal from the Pirani measuring element. 3. Fill the small tube of the measuring element with industrial alcohol. 4.

  • Page 38
    Maintenance Required spare part ● Ignition aid 1. Insert the new ignition aid in the mounting tool. 2. Carefully push the anode (either new or cleaned) into the ignition aid, in the center, and parallel to the tool axis. 3. Insert the anode approx. 15 mm. Positioning the anode The final positioning will be achieved only after the installation of the anode.
  • Page 39: Malfunctions

    Malfunctions 9 Malfunctions Warranty Malfunctioning of the equipment as a direct result of contamination or wear, as well as wear parts (e.g. ignition aid) is not covered by the warranty. Problem Possible cause Remedy Continuous measuring signal < 0.5 V No supply Switch on supply «Error low»…

  • Page 40: Shipping

    ► Comply with the instructions for safe shipping. Shipping the product safely Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared «Free of contamination» at your expense. 1. Do not ship microbiological, explosive or radioactively contaminated products. 2. Observe the shipping guidelines for the participating countries and transport companies.

  • Page 41: Disposal

    Disposal 11 Disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage.

  • Page 42: Service Solutions From Pfeiffer Vacuum

    We are consistently striving to perfect our core competence, service for vacuum components. And our service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really just begins then. In proven Pfeiffer Vacuum quality, of course.

  • Page 43
    Service solutions from Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the details in the declaration of contamination. a) Neutralize the product with nitrogen or dry air. b) Close all openings with airtight blank flanges. c) Seal the product in appropriate protective film.
  • Page 44: Ordering Information

    BN 846 239 -T Item 3 (3×), item 4 (1×), item 5 (1×), item 6 (1×) Repair kit, PKR 251, complete BN 846 238 -T Item 2 (1×), item 3 (3×), item 4 (1×), item 5 (1×), item 6 (1×), item 7 (1×)

  • Page 45: Accessories

    PT R26 002 -A Exchange gauge (DN 40 CF-F) 13.3 Accessories Installation and operation of accessories Pfeiffer Vacuum offers a series of special, compatible accessories for its products. ● Information and ordering options for ActiveLine accessories can be found online. Description…

  • Page 46: Technical Data And Dimensions

    100 m (0.34 mm / conductor) max. 300 m (1.0 mm / conductor) The minimum voltage for the supply unit must be increased proportional to the cable length. Pfeiffer Vacuum measuring and control equipment complies with this requirement. 46/52…

  • Page 47: Tbl. 10: Electrical Data

    Technical data and dimensions Parameter Value Earthing concept (see chapter “Establishing the electrical connection”, page 21) Vacuum connection and signal Connected with 10 kΩ (max. differential ground voltage with regard to safety ± 50 V, with regard to accuracy ± 10 V) Supply earth and signal earth Channeled separately;…

  • Page 48: Dimensions

    Technical data and dimensions VACUUM VACUUM 101.5 18.5 VACUUM VACUUM Fig. 17: Dimensions Dimensions in mm. 48/52…

  • Page 49: Appendix

    Appendix 15 Appendix 15.1 Units of pressure Unit mbar Torr / mm Hg mbar 1 · 10 0.75 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr / mm Hg 1.33 133.32 1.33…

  • Page 50: Etl Listed

    ETL LISTED The product PKR 251 — conforms to the UL standard UL 61010-1. — is certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1. 3103457…

  • Page 51: Declaration Of Conformity

    We hereby declare that the product cited below satisfies all relevant provisions of the follow- ing EU Directives: ● Electromagnetic compatibility 2014/30/EU ● Restriction of the use of certain hazardous substances 2011/65/EU Pirani/cold cathode gauge PKR 251 Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07…

Датчики Pfeiffer
Потребляемая мощность, Вт < 2
Диапазон измерения, мбар

5*10-9 – Атм.

Максимальное давление, атм 10
Рабочая температура, оС 5 — 55
Температура отжига, макс., оС 150 со снятой электроникой
Питание, В 15…30
Материалы, обращённые в вакуум Нержавеющая сталь, Al2O3, Mo, стекло, витон, Ni, Au, W
Точность

±30% в диапазоне 10-8 – 100 мбар

Фланцы

DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F

Время отклика, мс

< 10 мс
≈ 1 с

Воспроизводимость

±5% в диапазоне 10-8 – 100 мбар

Максимальная длина кабеля, м 300
Анод Молибден

Описание

Компания Pfeiffer Vacuum предлагает пользователям на выбор аналоговые вакуумметры серии ActiveLine с диапазоном измерения от атмосферного давления до сверхвысокого вакуума.
Серия вакуумметров ActiveLine включает в себя восемь различных типов датчиков и три блока питания и индикации.

Преимущества для клиентов

  • Охватывает весь вакуумный диапазон
  • Подходит для всех профилей требований
  • Компактная установка благодаря малым размерам
  • Оптимальное соотношение затрат и выгод
  • Универсальное использование благодаря встроенному электронному приводу
  • Простая самодиагностика
  • Предотвращает ошибки при установке через контроллеры с автоматическим распознаванием передатчика
  • Простая проводка для всех передатчиков через единые стандартные кабели

Доставка осуществляется всеми видами транспортных компаний.
В основном мы работаем транспортными компаниями:
Деловые линии, СДЭК, DPD, Pony Express.
Доставка осуществляется до адреса или до терминала транспортной компании.
По г. Санкт-Петербург возможна доставка Gett Delivery (максимальный срок 1 час в любую точку города).
Также возможен самовывоз с нашего склада по адресу:Санкт-Петербург, ул. Бестужевская, дом 10.
В Москве возможен самовывоз некоторых позиций со складов компаний-партнеров.

Мы осуществляем бесплатную доставку до терминала транспортных компаний.
Доставка заказов от 50 000 рублей — бесплатно.

Оплата осуществляется по безналичному расчету. Оплата возможна на
юридическое лицо, работающее с НДС (ОСН) и без НДС (УСН).

Серия PKR (Пирани / Холодный катод) с очень низким магнитным полем

PKR 360 PKR 360
low current с меньшим распылением
PKR 361
high current с улучшенным зажиганием
Специфика применения для работы на среднем вакууме для работы на высоком и сверхвысоком вакууме
Исполнение стандартное или корозионностойкое
Диапазон измерения, мбар 10-8 — Атм.
Фланцы DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
Анод Молибден
Точность ±30% в диапазоне 10-8 – 100 мбар
Воспроизводимость ±5% в диапазоне 10-8 – 100 мбар
Время отклика
P > 10-6 мбар
P = 10-8 мбар
< 100 мс
≈ 1 с
Рабочая температура, оС 5-55
Температура отжига (макс.), оС 150 со снятой электроникой
Максимальное давление, атм 10
Питание, В 15…30
Вес, кг 0,28
Материалы, обращённые в вакуум нерж.сталь, Al2O3, Mo, стекло, титан, W
Потребляемая мощность, Вт < 2
Максимальная длина кабеля, м 300
Видео: Процедура замены ионизирующей камеры
и кольца поджига разряда в вакуммных датчиках
ActiveLine IKR/ PKR 36x
Видео: Процедура замены измерительного блока
в вакуммных датчиках ActiveLine IKR/ PKR 36x
Серия PKR (Пирани / Холодный катод)
PKR 261 PKR 360
low current с меньшим распылением
PKR 361
high current с улучшенным зажиганием
Специфика применения для работы на среднем вакууме для работы на высоком и сверхвысоком вакууме
Исполнение стандартное или корозионностойкое
Диапазон измерения, мбар 10-8 — Атм.
Фланцы DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
Анод Молибден
Точность ±30% в диапазоне 10-8 – 100 мбар
Воспроизводимость ±5% в диапазоне 10-8 – 100 мбар
Время отклика
P > 10-6 мбар
P = 10-8 мбар
< 100 мс
≈ 1 с
Рабочая температура, оС 5-55
Температура отжига (макс.), оС 150 со снятой электроникой
Максимальное давление, атм 10
Питание, В 15…30
Вес, кг 0,28
Материалы, обращённые в вакуум нерж.сталь, Al2O3, Mo, стекло, титан, W
Потребляемая мощность, Вт < 2
Максимальная длина кабеля, м 300
Видео: Процедура замены ионизирующей камеры
и кольца поджига разряда в вакуммных датчиках
ActiveLine IKR/ PKR 36x
Видео: Процедура замены измерительного блока
в вакуммных датчиках ActiveLine IKR/ PKR 36x
Серия PKR (Пирани / Холодный катод)
PKR 261

PKR 251

PKR 261

Диапазон измерения, мбар 5*10-9 – Атм. 5*10-9 – Атм.
Фланцы DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
Анод Молибден Молибден
Точность ±30% в диапазоне 10-8 – 100 мбар
Воспроизводимость ±5% в диапазоне 10-8 – 100 мбар
Время отклика
P > 10-6 мбар
P = 10-8 мбар
< 10 мс
≈ 1 с
< 10 мс
≈ 1 с
Рабочая температура, оС 5 — 55 5 — 55
Температура отжига, макс., оС 150 со снятой электроникой 150 со снятой электроникой
Максимальное давление, атм 10 10
Питание, В 15…30 15…30
Материалы, обращенные в вакуум Нержавеющая сталь, Al2O3, Mo, стекло, витон, Ni, Au, W Только металл:
Нержавеющая сталь, Al2O3, Mo, стекло, Ag, Cu, Ni, Au, W
Потребляемая мощность, Вт < 2 < 2
Максимальная длина кабеля, м 300 300

Вакуумметр Pfeiffer Vacuum GmbH PKR 251 – полное описание модели

Основные характеристики: мощность 0.002 кВт, работает в напряжении 30 В, страна производитель — Германия.

Цифровой вакуумметр Пирани с холодным катодом Pfeiffer Vacuum ActiveLine PKR 251 в наличии на нашем складе! Сравните характеристики и отзывы заказчиков. Подберем вакуумную технику Pfeiffer Vacuum GmbH под любые нужды, большой ассортимент в наличии. Предусмотрена гарантия в течение календарного года на вакуумное оборудование. Осуществляем безопасную перевозку оборудования любыми транспортными службами.

Посмотрите похожие подборки оборудования

Характеристики Pfeiffer Vacuum GmbH PKR 251

Производитель

Pfeiffer Vacuum GmbH

Мощность электродвигателя

0.002 кВт

Вход и выход

DN 25 ISO-KF, DN 40 ISO-KF, DN 40 CF-F

Температурный режим

от 5 до 55 °С

Материалы, обращённые в вакуум

Нержавеющая сталь, Al2O3, Mo, стекло, витон, Ni, Au, W

Диапазон измерения

0.000000005 мбар

Максимальное давление

10 атм

Тип сенсора

Пирани / Холодный катод

Температура отжига

150 со снятой электроникой °C

Максимальная длина кабеля

300 м

Доставка по Москве

3 дня при заказе до 12 ч.

Гарантия 1 год

Гарантия по договору

Дилерские цены

Напрямую с завода


Информация о стоимости и сроках доставки 

Доставка по Москве

Стоимость доставки Срок доставки При заказе до
Бесплатно 3 дн. до 12 ч.

Доставка по России и в отдаленные регионы

Стоимость доставки Срок доставки При заказе до
Бесплатно 14 дн. до 12 ч.

Способы оплаты:

  • Оплата по счету(с НДС) согласно договору;
  • Оплата картой/наличными по договору.

Мы сотрудничаем только с такими проверенными транспортными компаниями, как:

  • «Деловые линии»;
  • «Желдорэкспедиция»;
  • «Байкал-Сервис».

Координируем и контролируем передвижение груза на всем пути следования, предоставляем пакет сопровождающих документов.


Вопросы и отзывы

Оцените качество магазина на Яндекс.Маркете.

Вопросы и отзывы

Оцените качество магазина на Яндекс.Маркете.

Dear customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support

you in your individual application with maximum performance and without malfunctions. The

name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and

complete range of top-quality products and first-class service. From this extensive, practical

experience we have gained a large volume of information that can contribute to efficient

deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

Copyright

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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